TY - RPRT TI - Robust Microfabrication of Highly Parallelized Three-Dimensional Microfluidics on Silicon AU - Yadavali, S. AU - Lee, D. AU - Issadore, D. PY - 2019 DO - 10.1101/625277 UR - https://www.biorxiv.org/content/10.1101/625277v1 ID - 10.1101/625277 ER -