TY - RPRT TI - Sputtered porous Pt for wafer-scale manufacture of low-impedance flexible microelectrodes AU - Fan, B. AU - Rodriguez, A. V. AU - Vercosa, D. L. AU - Kemere, C. AU - Robinson, J. T. PY - 2020 DO - 10.1101/2020.02.04.934737 UR - https://www.biorxiv.org/content/10.1101/2020.02.04.934737v1 ID - 10.1101/2020.02.04.934737 ER -